Performance evaluation of the commercial point of inflection thermometry substrate temperature monitor

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 3, 1996, Pages 2166-2169

  Svensson, Stefan P ^a,b   Gill, David M ^a,c  

^a LOCKHEED MARTIN   (United States)

^b U S ARMY RESEARCH LABORATORY   (United States)

^c NATIONAL SEMICONDUCTOR CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 4043167972     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588891     Document Type: Review

References (4)

1. E. S. Hellman and J. S. Harris, J. Cryst. Growth 81, 38 (1987).
2. Varian final report, MIMIC Phase III Contract No. DAAL01-890C-0907.
3. D. S. Katzer and B. V. Shanabrook, J. Vac. Sci. Technol. B 11, 1003 (1993).
4. B. V. Shanabrook, J. R. Waterman, J. L. Davis, R. J. Wagner, and D. S. Katzer, J. Vac. Sci. Technol. B 11, 994 (1993).