Microwave compatible electromagnetic valve for plasma deposition studies

Review of Scientific Instruments

Volumn 67, Issue 10, 1996, Pages 3675-3678

  Sanner, Mark A ^a   Park, Jin Y ^a  

^a UNIVERSITY OF IDAHO   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 4043153883     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1147134     Document Type: Article

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