High-resolution optical angle sensors: Approaching the diffraction limit to the sensitivity

Applied Optics

Volumn 43, Issue 22, 2004, Pages 4311-4321

  García Valenzuela, Augusto ^a   Sandoval Romero, Gabriel E ^a   Sánchez Pérez, Celia ^a  

^a UNIVERSIDAD NACIONAL AUTÓNOMA DE MÉXICO   (Mexico)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMAGNETIC WAVE DIFFRACTION; FABRICATION; LASER BEAMS; LIGHT POLARIZATION; PHOTOCURRENTS; SENSITIVITY ANALYSIS; ULTRASONICS;

ANGLE-SENSITIVE DEVICES; CRITICAL-ANGLE EFFECTS; DIFFRACTION LIMITS; OPTICAL ANGLE SENSORS;

OPTICAL SENSORS;

EID: 4043065252     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.43.004311     Document Type: Article

References (30)

1. S. Alexander, L. Hellemans, O. Marti, J. Schneir, V. Elings, P. K. Hansma, M. Longmire, and J. Gurley, "An atomic-resolution atomic-force microscope implemented using an optical lever," J. Appl. Phys. 65, 164-167 (1989).
2. C. A. J. Putman, B. G. De Grooth, N. F. van de Hulst, and J. Greve, "A detailed analysis of the optical beam deflection technique for use in atomic force microscopy," J. Appl. Phys. 72, 6-12 (1992).
3. G. Meyer and N. M. Amer, "Simultaneous measurement of lateral and normal forces with an optical-beam-deflection atomic force microscope," Appl. Phys. Lett. 87, 2089-2091 (1990).
4. B. H. Kim, F. E. Prins, D. P. Kern, S. Raible, and U. Weimar, "Multicomponent analysis and prediction with a cantilever array based gas sensor," Sens. Actuators B 77, 1-7 (2001).
5. F. M. Battiston, J.-P. Ramseyer, H. P. Lang, M. K. Baller, C. Gerber, J. K. Gimzewski, E. Meyer, and H.-J. Güntherodt, "A chemical sensor based on a microfabricated cantilever array with simultaneous resonance-frequency and bending readout," Sens. Actuators B 77, 122-131 (2001).
6. J. R. Barnes, R. J. Stephenson, C. N. Woodburn, S. J. O'Shea, M. E. Welland, T. Rayment, J. K. Gimzewski, and C. Gerber, "A femtojoule calorimeter using michromechanical sensors," Rev. Sci. Instrum. 68, 3793-3798 (1994).
7. R. Raiteri, M. Grattarola, H.-J. Butt, and P. Sklàdal, "Micromechanical cantilever-based biosensors," Sens. Actuators B 79, 115-126 (2001).
8. A. C. Boccara, D. Fournier, and J. Badoz, "Thermo-optical spectroscopy: detection by the "mirage effect," Appl. Phys. Lett. 36, 130-132 (1980).
9. J. C. Murphy and L. C. Aamodt, "Photothermal spectroscopy using optical beam probing: mirage effect," J. Appl. Phys. 51, 4580-4588 (1980).
10. B. Zimering and A. C. Boccara, "Compact design for real time in situ atmospheric trace gas detection based on mirage effect (photothermal deflection) spectroscopy," Rev. Sci. Instrum. 67, 1891-1895 (1996).
11. A. L. Glazov and K. L. Muratikov, "Measurement of thermal parameters of solids by a modified photodeflection method," Opt. Eng. 36, 358-362 (1997).
12. A. Salazar, A. Sánchez-Lavega, and J. Fernández, "Theory of thermal diffusivity determination by the "mirage" technique in solids," J. Appl. Phys. 65, 4150-4156 (1989).
13. D. P. Almond and P. M. Patel, Photothermal Science and Techniques (Chapman & Hall, London, 1996).
14. J. Opsal, A. Rosencwaig, and D. L. Willenborg, "Thermal-wave detection and thin-film thickness measurements with laser beam deflection, " Appl. Opt. 22, 3169-3176 (1983).
15. T. Kohno, N. Ozawa, K. Miyamoto, and T. Musha, "High precision optical surface sensor," Appl. Opt. 27, 103-108 (1988).
16. A. E. Ennos and M. S. Virdee, "High accuracy profile measurement of quasi-conical mirror surfaces by laser autocollimation," Precis. Eng. 4, 5-8 (1982).
17. S. R. Cook, M. A. Hoffbauer, and J. B. Cross, "A specialized torsion balance designed to measure the absolute flux density of hyperthermal molecular beams containing reactive species," Rev. Sci. Instrum. 67, 1781-1789 (1996).
18. J. N. Caron, Y. Yang, and J. B. Mehl, "Gas-coupled laser acoustic detection at ultrasonic and audio frequencies," Rev. Sci. Instrum. 60, 2912-2917 (1998).
19. B. A. Williams and R. J. Dewhurst, "A fiber-optic detection system for laser-ultrasound Lamb-wave examination of defects in thin materials," Nondestr. Test. Eval. 12, 343-353 (1996).
20. M. Rosete-Aguilar and R. Díaz-Uribe, "Profile testing of spherical surfaces by laser deflectometry," Appl. Opt. 32, 4690-4697 (1993).
21. W. Gao, S. Kiyono, and T. Nomura, "A new multiprobe method of roundness measurements," Precis. Eng. 19, 37-45 (1996).
22. P. S. Huang, S. Kiyono, and O. Kamada, "Angle measurement based on the internal-reflection effect: a new method," Appl. Opt. 31, 6047-6055 (1992).
23. P. S. Huang and J. Ni, "Angle measurement based on the internal-reflection effect using elongated critical-angle prisms," Appl. Opt. 35, 2239-2241 (1996).
24. A. García-Valenzuela and R. Diaz-Uribe, "Detection limits of an internal-reflection sensor for the optical beam deflection method," Appl. Opt. 36, 4456-4462 (1997).
25. P. S. Huang and Y. Li, "Small-angle measurement by use of a single prism," Appl. Opt. 37, 6636-6642 (1998).
26. J. Villatoro and A. García-Valenzuela, "Measuring optical power transmission near the critical angle for sensing beam deflection," Appl. Opt. 37, 6648-6653 (1998).
27. S. Zhang, S. Kiyono, and Y. Uda, "Nanoradian angle sensor and in situ self-calibration," Appl. Opt. 37, 4154-4159 (1998).
28. P. S. Huang, "Use of thin films for high-sensitivity angle measurement," Appl. Opt. 38, 4831-4836 (1999).
29. A. Zhang and P. S. Huang, "Total internal reflection for precision small-angle measurement," Appl. Opt. 40, 1617-1622 (2001).
30. A. García-Valenzuela, M. Peña-Gomar, and J. Villatoro, "Sensitivity analysis of angle sensitive detectors based on a film resonator," Opt. Eng. 42, 1084-1092 (2003).