Molecular dynamics simulations of GaAs sputtering under low-energy argon ion bombardment

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 26, Issue 2, 2008, Pages 274-280

  Despiau Pujo, Emilie ^a   Chabert, Pascal ^a   Graves, David B ^b  

^a ECOLE POLYTECHNIQUE   (France)

^b University of California   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC SPECIES; INCIDENT ION ENERGY; PHYSICAL SPUTTERING; THERMAL DESORPTION MODEL;

ARGON; ION BOMBARDMENT; MOLECULAR BEAM EPITAXY; MOLECULAR DYNAMICS; PASSIVATION; SPUTTERING;

GALLIUM COMPOUNDS;

EID: 40249118581     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2836408     Document Type: Article

References (22)