Reduced gas phase and surface kinetics for silicon carbide epitaxial growth

ECS Transactions

Volumn 2, Issue 7, 2006, Pages 11-20

  Veneroni, A ^a   Masi, M ^a  

^a POLITECNICO DI MILANO   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CHLORINE COMPOUNDS; DEPOSITION; HYDROCHLORIC ACID; QUANTUM THEORY; SILICON CARBIDE; SURFACE CHEMISTRY;

CHEMICAL MECHANISM; CHLORINATED HYDROCARBONS; GAS PHASES; SURFACE KINETICS;

EPITAXIAL GROWTH;

EID: 40249090389     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.2408899     Document Type: Conference Paper

References (19)