Microdeflectometry - A novel tool to acquire three-dimensional microtopography with nanometer height resolution

Optics Letters

Volumn 33, Issue 4, 2008, Pages 396-398

  Häusler, Gerd ^a   Richter, Claus ^a   Leitz, Karl Heinz ^a   Knauer, Markus C ^a  

^a UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

MICRODEFLECTOMETRY; MICROTOPOGRAPHY; NANOMETER HEIGHT RESOLUTION;

IMAGING TECHNIQUES; OPTICAL RESOLVING POWER; SCANNING ELECTRON MICROSCOPY; SENSITIVITY ANALYSIS; THREE DIMENSIONAL;

SURFACE TOPOGRAPHY;

EID: 40149099302     PISSN: 01469592     EISSN: None     Source Type: Journal    
DOI: 10.1364/OL.33.000396     Document Type: Article

References (13)