Fabrication and testing investigation of low-voltage integrated electrophoresis chip based on silicon-on-insulator-MEMS

Journal of Micro/Nanolithography, MEMS, and MOEMS

Volumn 6, Issue 3, 2007, Pages

  Xu, Yi ^a   Shen, Ji W ^a   Lu, Jia L ^a   Wen, Zhi Y ^a  

^a CHONGQING UNIVERSITY   (China)

Author keywords

Arrayed electrodes; Low voltage electrophoresis; Microchip fabrication; Silicon on insulator (SOI)

Indexed keywords

ELECTRODES; ELECTROPHORESIS; MEMS; PARAMETER ESTIMATION; POLYSILICON; SILICON ON INSULATOR TECHNOLOGY;

ARRAYED-ELECTRODES; HYBRID ELECTROPHORESIS CHIP; LOW-VOLTAGE ELECTROPHORESIS; MICROCHIP FABRICATION;

MICROPROCESSOR CHIPS;

EID: 40149083609     PISSN: 19325150     EISSN: 19325134     Source Type: Journal    
DOI: 10.1117/1.2770459     Document Type: Article

References (15)