Automated hot-spot fixing system applied to the metal layers of 65-nm logic devices

Journal of Micro/Nanolithography, MEMS, and MOEMS

Volumn 6, Issue 3, 2007, Pages

  Kobayashi, Sachiko ^a   Kyoh, Suigen ^a   Kotani, Toshiya ^a   Tanaka, Satoshi ^a   Inoue, Soichi ^a  

^a TOSHIBA CORPORATION   (Japan)

Author keywords

Design for manufacturability; Design rules; Hot spot fixing; Layout modification

Indexed keywords

COMPUTER SIMULATION; LITHOGRAPHY; PRODUCT DESIGN;

DESIGN FOR MANUFACTURABILITY; LAYOUT MODIFICATION;

LOGIC DEVICES;

EID: 40049104048     PISSN: 19325150     EISSN: 19325134     Source Type: Journal    
DOI: 10.1117/1.2785030     Document Type: Article

References (10)