Optimization of off-null ellipsometry for air/solid interfaces

Applied Optics

Volumn 46, Issue 35, 2007, Pages 8475-8481

  Chen, Yanyan ^a,b   Meng, Yonghong ^a   Jin, Gang ^a  

^a INSTITUTE OF MECHANICS   (China)

^b SUZHOU INSTITUTE OF NANO TECH AND NANO BIONICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

INTERFACES (MATERIALS); LIGHT POLARIZATION; SENSITIVITY ANALYSIS; SIGNAL TO NOISE RATIO; SILICA;

ELLIPSOMETER ARRANGEMENT; OPTIMAL SETTINGS;

ELLIPSOMETRY;

EID: 39849092146     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.46.008475     Document Type: Article

References (8)