Analytical formula for inductance of metal of various widths in spiral inductors

IEEE Transactions on Electron Devices

Volumn 51, Issue 8, 2004, Pages 1343-1346

  Hsu, Heng Ming ^a  

^a NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; CAPACITANCE; EDDY CURRENTS; ELECTRIC CONDUCTORS; INDUCTANCE; MONOLITHIC MICROWAVE INTEGRATED CIRCUITS; SILICON ON INSULATOR TECHNOLOGY; STRIP METAL;

ANALYTICAL FORMULA; GEOMETRIC MEAN DISTANCE; QUASI STATIC APPROXIMATION; SPIRAL INDUCTORS; VARIABLE METAL WIDTH;

ELECTRIC INDUCTORS;

EID: 3943053428     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2004.832094     Document Type: Article

References (18)

1. J. Craninckx and M. Steyaert, Wireless CMOS Frequency Synthesizer Design. Norwell, MA: Kluwer, 1998.
2. J. N. Burghartz and B. Rejaei, "On the design of RF spiral inductors on silicon," IEEE Trans. Electron Devices, vol. 50, pp. 718-729, Mar. 2003.
3. L. H. Lu, G. E. Ponchak, P. Bhattacharya, and L. P. B. Katehi, "High-Q x-band and κ-band micromachined spiral inductors for use Si-based integrated circuits," in IEEE MTT-S Int. Symp. Dig., 2000, pp. 108-112.
4. L. S. Lee, C. Liao, C. L. Lee, T. H. Huang, D. L. Tang, T. S. Duh, and T. T. Yang, "Isolation of Si wafers by Mev proton bombardment for RF integrated circuits," IEEE Trans. Electron Devices, vol. 48, pp. 928-934, May 2001.
5. H. Jiang, Y. Wang, J. L. Yeh, and N. C. Tien, "On-chip spiral inductors suspended over deep copper-lined cavities," IEEE Trans. Microwave Theory Tech., vol. 48, pp. 2415-2423, Dec. 2000.
6. J. M. Lopez-Villegas, J. Samitier, C. Cane, and P. Losantos, "Improvement of the quality factor of RF integrated inductors by layout optimization," in Proc. RFIC Symp., 1998, pp. 169-172.
7. J. Craninckx and M. S. J. Steyaert, "A 1.8-GHz low-phase-noise CMOS VCO using optimized hollow spiral inductors," IEEE J. Solid-State Circuits, vol. 32, pp. 736-744, May 1997.
8. J. M. Lopez-Villegas, J. Samitier, C. Cane, P. Losantos, and J. Bausells, "Improvement of quality factor of RF integrated inductors by layout optimization," IEEE Trans. Microwave Theory Tech., vol. 48, pp. 76-83, Jan. 2000.
9. J. Sieiro, J. M. Lopez-Villegas, J. Cabanillas, J. A. Osorio, and J. Samitier, "A physical frequency-dependent compact model for RF integrated inductors," IEEE Trans. Microwave Theory Tech., vol. 50, pp. 384-392, Jan. 2002.
10. I. J. Bahl, "Improved quality factor spiral inductors on GaAs substrates," IEEE Microwave Guided Wave Lett., vol. 9, pp. 398-400, Oct. 1999.
11. H. M. Greenhouse, "Design of planar rectangular microelectronic inductors," IEEE Trans. Parts, Hybrids, and Packaging, vol. 10, pp. 101-109, June 1974.
12. Y. K. Koutsoyannopoulos and Y. Papananos, "Systematic analysis and modeling of integrated inductors and transformers in RF IC design," IEEE Trans. Circuits Syst., vol. 47, pp. 699-713, Aug. 2000.
13. C. P. Yue and S. S. Wong, "Physical modeling of spiral inductors on silicon," IEEE Trans. Electron Devices, vol. 47, pp. 560-568, Mar. 2000.
14. F. W. Grover, Inductance Calculations. Princeton, NJ: Van Nostrand, 1946.
15. J. C. Maxwell, A Treatise on Electricity and Magnetism, Parts III and IV. New York: Dover, 1873.
16. E. Pettenpaul, H. Kapusta, A. Weisgerber, H. Mampe, J. Luginsland, and I. Wolff, "CAD models of lumped elements on GaAs up to 18 GHz," IEEE Trans. Microwave Theory Tech., vol. 36, pp. 294-304, Feb. 1988.
17. TSMC 0.18 μm Mixed Signal 1P6M+ Salicide 1.8 V/3.3 V Spice Models [Online]. Available: http://www.tsmc.com
18. M. C. A. M. Koolen, J. A. M. Geelen, and M. P. J. G. Versleijen, "An improved de-embedding technique for on-wafer high-frequency characterization," in Proc. IEEE Proc. Bipolar/BiCMOS Circuits and Technology Meeting, 1991, pp. 188-192.