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Volumn 3357, Issue , 1998, Pages 319-325
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Bolometer array development at the Max-Planck-Institut für radioastronomie
a a a a a b b c d e |
Author keywords
Absorbers; Bolometers; Micromachining
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Indexed keywords
BOLOMETERS;
COMPOSITE MICROMECHANICS;
GERMANIUM;
MACHINING;
MICROMACHINING;
NITRIDES;
OPTICAL INSTRUMENTS;
OPTICAL TELESCOPES;
SEMICONDUCTING SILICON COMPOUNDS;
SILICON WAFERS;
SINGLE CRYSTALS;
TELESCOPES;
ABSORBERS;
BOLOMETER ARRAYS;
GENERAL ASPECTS;
GERMANY;
HYBRID APPROACHES;
MICROFABRICATION TECHNOLOGIES;
NITRIDE MEMBRANES;
RADIATION FIELDS;
SINGLE MODES;
INFRARED DETECTORS;
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EID: 3943051216
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.317367 Document Type: Conference Paper |
Times cited : (141)
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References (4)
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