High-finesse micromachined fabry-perot cavities with Silicon/Air DBR mirrors

Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS

Volumn , Issue , 2006, Pages 46-47

  Pruessner, Marcel W ^a   Stievater, Todd H ^a   Rabinovich, William S ^a  

^a NAVAL RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYOGENICS; ETCHING; MICROMACHINING; MIRRORS; REFLECTION; SEMICONDUCTING SILICON;

CRYOGENICALLY-ETCHED SILICON/AIR DBR MIRRORS; MICROMACHINED FABRY-PEROT CAVITIES;

CAVITY RESONATORS;

EID: 39049167089     PISSN: 10928081     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/LEOS.2006.278811     Document Type: Conference Paper

References (5)

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2. B. E. Little, S. T. Chu, H. A. Haus, J. Foresi, and J.-P. Laine, "Microring Resonator Channel Dropping Filters," J. Lightwave Technol., vol. 15, pp. 998-1005, 1997.
3. M. Datta, M.W. Pruessner, K. Amarnath, J. McGee, S. Kanakaraju, and R Ghodssi, "Wavelength-Selective Integrated Optical MEMS Filter in InP," Proc. 18th Int. Conf. on Micro-Electro-Mechanical Systems, Miami Beach, FL, pp. 88-91, 2005.
4. C. Angulo Barrios, V. R Almeida, R. R. Panepucci, B. S. Schmidt, and M. Lipson, "Compact Silicon Tunable Fabry-Perot Resonator with Low Power Consumption," IEEE Photon. Technol. Lett., vol. 16, pp. 506-508, 2004.
5. G. Cocorullo and I. Rendina, "Thermo-optical modulation at 1.5 μm in silicon etalon," Electron. Lett., vol. 28, pp. 83-85, 1992.