Electrical characteristics of polycrystalline 3C-SiC thin films

2007 8th Annual International Workshop and Tutorials on Electron Devices and Materials, EDM'07 - Proceedings

Volumn , Issue , 2007, Pages 32-33

  Ahn, Jeong Hak ^a   Chung, Gwiy Sang ^a  

^a University of Ulsan   (South Korea)

Author keywords

p n junction diode; Polycrystalline 3C SiC; Schottky diode; SEM

Indexed keywords

LEAKAGE CURRENTS; POLYSILICON; SCANNING ELECTRON MICROSCOPY; SCHOTTKY BARRIER DIODES; SEMICONDUCTOR JUNCTIONS; SILICON CARBIDE; X RAY DIFFRACTION ANALYSIS;

GOLD DEPOSITION; P-N JUNCTION DIODE;

THIN FILMS;

EID: 39049164643     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SIBEDM.2007.4292899     Document Type: Conference Paper

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