CTCSS (Cluster Tool Controller Software System): The Flexible Control System for the Cluster Structured Semiconductor Processing Equipment

IEEJ Transactions on Industry Applications

Volumn 124, Issue 2, 2004, Pages 160-167

  Sato, Takashi ^a   Yoshida, Eiji ^a   Kakebayashi, Yasunori ^a   Komada, Norihisa ^b  

^a KOBE STEEL LTD   (Japan)

^b OSAKA UNIVERSITY   (Japan)

Author keywords

cluster tool; IEC61131 3 standard; module; scenario; semiconductor processing equipment; user interface

Indexed keywords

EID: 38949140594     PISSN: 09136339     EISSN: 13488163     Source Type: Journal    
DOI: 10.1541/ieejias.124.160     Document Type: Article

References (2)

1. K. Ohyama: “Stability Analysis of Speed Sensorless Vector Control System of Induction Machine at Zero Stator Frequency Operation”, 2001 National Convention Record, IEE Japan, No. 2-132, pp. 721-722 (2001) (in Japanese)
2. H. Irie, S. Ogasawara, and H. Akagi : “Flux-Position of an Induction Machine Based on Magnetic Saturation Simulation Using a Magnetic-Saturation Model-”, 2000 National Convention Record, IEE Japan, No. 4-1012, pp. 455-456 (1999) (in Japanese)