A new approach for MEMS power generation based on a piezoelectric diaphragm

Sensors and Actuators, A: Physical

Volumn 142, Issue 1, 2008, Pages 292-297

  Kuehne, Ingo ^a   Marinkovic, Djordje ^a   Eckstein, Gerald ^a   Seidel, Helmut ^b  

^a SIEMENS AG   (Germany)

^b SAARLAND UNIVERSITY   (Germany)

Author keywords

Energy converter; Piezoelectric diaphragm; Piezoelectric energy conversion; Power MEMS

Indexed keywords

DIAPHRAGMS; ELECTRIC LOADS; ENERGY CONVERSION; FREQUENCY RESPONSE; MEMS; PIEZOELECTRIC MATERIALS;

ENERGY CONVERTERS; PIEZOELECTRIC DIAPHRAGM; PIEZOELECTRIC ENERGY CONVERSION;

ELECTRIC GENERATORS;

EID: 38849197520     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.04.031     Document Type: Article

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