Experimental study of microelectrode array and micro-hole array fabricated by ultrasonic enhanced micro-EDM

Key Engineering Materials

Volumn 364-366 I, Issue , 2008, Pages 482-487

  Zeng, Wei Liang ^a,b   Gong, Yan Ping ^a   Liu, Ying ^a   Wang, Zhen Long ^b  

^a HARBIN NORMAL UNIVERSITY   (China)

^b HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Micro EDM; Micro hole array; Microelectrode array; Ultrasonic enhanced

Indexed keywords

ELECTRIC ARC WELDING; MACHINING; MICROARRAYS; MICROELECTRODES;

MICRO ELECTRICAL DISCHARGE MACHINING (EDM); MICRO-HOLE ARRAYS; MICROELECTRODE ARRAYS;

ELECTRIC DISCHARGES;

EID: 38849132798     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: None     Document Type: Conference Paper

References (5)

1. J. P. Donoghue: Connecting cortex to machines: Recent advances in brain interfaces, Nature Neur. Rev, vol. 5, pp. 1085-1088, 2002.
2. M. A. L. Nicolelis, Ed: Methods for Neural Ensemble Recording, Boca Raton, FL: CRC Press, (1999).
3. Ken'ichi Takahata, Yogesh B. Gianchandani in: BATCH MODE MICRO-EDM FOR HIGH-DENSITY AND HIGH-THROUGHPUT MICROMACHINING, 0-7803-5998-4/01/ $10.00 @2001 IEEE.
4. ZENG Weiliang, WANG Zhenlong, DONG Desheng: A NEW MICRO-EDM REVERSE COPYING TECHNOLOGY FOR MICROELECTRODE ARRAY FABRICATION, in International Technology and Innovation Conference China, Hangzhou, China, Nov.6-8, 2006, p. 160
5. W.L. Zeng, Z.L. Wang and Q. Gao: Mater. Sci. Forum Vol. 532-533 (2006), p. 225