Monitoring oxygen species in diamond hot-filament CVD by zircon dioxide sensors

Vacuum

Volumn 82, Issue 6, 2008, Pages 599-607

  Hirmke, J ^a   Rosiwal, S M ^a   Singer, R F ^a  

^a UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

Author keywords

CVD; Diamond CVD; Gas phase; Hot filament CVD; Oxygen measurement

Indexed keywords

CHEMICAL VAPOR DEPOSITION; OXYGEN; PARAMETER ESTIMATION; PRESSURE EFFECTS; ZIRCONIUM COMPOUNDS;

ACTIVATING FILAMENTS; COATING CONDITIONS; OXYGEN MEASUREMENT;

DIAMONDS;

EID: 38849090675     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2007.09.002     Document Type: Article

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