Optical and electrical properties of ITO/Ag/ITO multilayer thin films deposited by D.C. magnetron sputtering

Solid State Phenomena

Volumn 124-126, Issue PART 1, 2007, Pages 403-406

  Choi, Yong Lak ^a   Kim, Seon Hwa ^a  

^a Soonchunhyang University   (South Korea)

Author keywords

Flexible display; ITO; Microstructure; Sheet resistance; Transmittance

Indexed keywords

DEPOSITION; INDIUM COMPOUNDS; MAGNETRON SPUTTERING; MICROSTRUCTURE; OPACITY; SHEET RESISTANCE; THIN FILMS;

FLEXIBLE DISPLAYS; ISLAND MORPHOLOGY; LAYER THICKNESS;

MULTILAYER FILMS;

EID: 38749139318     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: 10.4028/3-908451-31-0.403     Document Type: Conference Paper

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