Lithium aluminosilicate glass-ceramic containing Na2O for low-temperature anodic bonding in microelectronic mechanical systems

Journal of Non-Crystalline Solids

Volumn 354, Issue 12-13, 2008, Pages 1407-1410

  Huang, Yourong ^a   Cui, Zhu ^a   Gao, Xiping ^a   Li, Changjiu ^a   Gu, Zhenan ^a  

^a CHINA BUILDING MATERIALS ACADEMY   (China)

Author keywords

Conductivity; Glass ceramics; Microcrystallinity; Microstructure; Thermal properties

Indexed keywords

ALUMINOSILICATES; LITHIUM COMPOUNDS; MICROELECTRONICS; MICROSTRUCTURE; THERMODYNAMIC PROPERTIES; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

ANODIC BONDING; BONDING RATE; MICROELECTRONIC MECHANICAL SYSTEMS;

GLASS CERAMICS;

EID: 38749087996     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jnoncrysol.2007.02.093     Document Type: Article

References (2)

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2. Shoji S., Kikuchi H., and Torigoe H. Sensor Actuator A 64 (1998) 95