메뉴 건너뛰기




Volumn 516, Issue 7, 2008, Pages 1508-1511

Deuterium influence on optical gap of amorphous carbon diamond-like carbon (DLC) thin film

Author keywords

Deuterated layer; Diamond like carbon; Electrical gap; Hydrogen; PECVD; Thin layer; UV spectroscopy

Indexed keywords

BIAS VOLTAGE; DEUTERIUM; HYDROGEN; OPTICAL BAND GAPS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON WAFERS;

EID: 38649116368     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.03.067     Document Type: Article
Times cited : (8)

References (24)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.