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Volumn 9, Issue 12, 2007, Pages 3901-3906
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Morphological and thickness analysis for PMMA spin coated films
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Author keywords
1,2 Dichloroethane; Film thickness; Morphology; PMMA (poly (methyl methacrylate)); Spin coating; Viscosity
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Indexed keywords
COATINGS;
ESTERS;
FILM THICKNESS;
SOLVENTS;
SPIN COATING;
SURFACE MORPHOLOGY;
VISCOSITY;
1 ,2-DICHLOROETHANES;
CONSTANT COEFFICIENTS;
DIFFERENT SOLVENTS;
EFFECTIVE PARAMETERS;
SPIN-COATED FILMS;
SPIN-COATING METHOD;
SURFACE UNIFORMITY;
THICKNESS ANALYSIS;
MORPHOLOGY;
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EID: 38549135181
PISSN: 14544164
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
Times cited : (33)
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References (17)
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