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Volumn 131-133, Issue , 2008, Pages 583-588
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Dislocation photoluminescence in silicon and germanium
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Author keywords
Dislocations; Germanium; Photoluminescence; Plastical deformation; Silicon
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Indexed keywords
DISLOCATIONS (CRYSTALS);
PHOTOLUMINESCENCE;
PLASTIC DEFORMATION;
RAPID THERMAL ANNEALING;
STACKING FAULTS;
SURFACE MORPHOLOGY;
DEFECTS;
SEMICONDUCTOR DEVICE MANUFACTURE;
SILICON;
SINGLE CRYSTALS;
DISLOCATION DENSITY;
DISLOCATION PHOTOLUMINESCENCE (DPL);
GERMANIUM SPECTRA;
DISLOCATION DENSITIES;
GAUSSIANS;
PLASTICAL DEFORMATIONS;
SINGLE CRYSTALS;
GERMANIUM;
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EID: 38549120161
PISSN: 10120394
EISSN: None
Source Type: Book Series
DOI: None Document Type: Conference Paper |
Times cited : (6)
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References (14)
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