Pore size control of a molecular sieve silica membrane prepared by a counter diffusion CVD method

Journal of Chemical Engineering of Japan

Volumn 40, Issue 13, 2007, Pages 1235-1241

  Nomura, Mikihiro ^a   Nagayo, Toshihiro ^a   Monma, Keita ^a  

^a SHIBAURA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Counter diffusion CVD; Pore size control; Silica membrane; Silica precursors

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DIFFUSION; MOLECULAR SIEVES; PERMEATION; PORE SIZE; REACTION KINETICS;

COUNTER DIFFUSION CHEMICAL VAPOR DEPOSITION; SILICA ALKOXIDES; SILICA MEMBRANE;

SILICA;

CHEMICAL VAPOR DEPOSITION; DIFFUSION; MOLECULAR SIEVES; PERMEATION; PORE SIZE; REACTION KINETICS; SILICA;

EID: 38449119802     PISSN: 00219592     EISSN: None     Source Type: Journal    
DOI: 10.1252/jcej.07WE065     Document Type: Article

References (22)

1. 2 Films," Chem. Eng. Sci., 44, 1829-1835 (1989)
2. Gopalakrishnan, S., M. Nomura, T. Sugawara and S. Nakao; "Preparation of a Multi Membrane Module for High Temperature Hydrogen Separation," Desalination, 193, 230-235 (2006)
3. Ha, H.-Y., S.-W. Nam, S.-A. Hong and W.-K. Lee; "Chemical Vapor Deposition of Hydrogen-Permselective Silica Films on Porous Glass Supports from Tetraethylorthosilicate," J. Membr. Sci., 85, 279-290 (1993)
4. Kanezashi, M. and M. Asaeda; "Hydrogen Permeation Characteristics and Stability of Ni-Doped Silica Membranes in Steam at High Temperature," J. Membr. Sci., 271, 86-93 (2006)
5. 3 Catalytic Layer Integrated with Sol-Gel Synthesized Microporous Silica Membrane for Compact Membrane Reactor Applications," Catal. Lett., 86, 273-278 (2003)
6. Kusakabe, K., S. Sakamoto T. Saie and S. Morooka; "Pore Structure of Silica Membranes Formed by a Sol-Gel Technique Using Tetraethoxysilane and Alkyltriethoxysilanes," Sep. Purif. Technol., 16, 139-146 (1999)
7. Lee, D., L. Zhang, S. T. Oyama, S. Niu and R. F. Saraf; "Synthesis, Characterization, and Gas Permeation Properties of a Hydrogen Permeable Silica Membrane Supported on Porous Alumina," J. Membr. Sci., 231, 117-126 (2004)
8. 2 Membrane in Macropores of α-Alumina Support Tube by Thermal Decomposition of TEOS," J. Membr. Sci., 101, 89-98 (1995)
9. Nair, B. N., T. Okubo and S. Nakao; "Structure and Separation Properties of Silica Membranes," Membrane, 25, 73-85 (2000)
10. 3 CVD in the Opposing Reactants Geometry," Microporous Mesoporous Mater., 37, 145-152 (2000)
11. Nomura, M., T. Yamaguchi, I. Kumakiri and S. Nakao; "Permeation Properties and Microstructure of Porous Inorganic Membranes" (in Japanese), Membrane, 26, 124-133 (2001)
12. Nomura, M., K. Ono, S. Gopalakrishnan, T. Sugawara and S. Nakao; "Preparation of a Stable Silica Membrane Using a Counter Diffusion Chemical Vapor Deposition Method," J. Membr. Sci., 251, 151-158 (2005a)
13. Nomura, M., S. Gopalakrishnan, H. Aida, T. Sugawara, S. Nakao, S. Yamazaki, Y. Iwamoto, R. Kojima and A. Nakao; "Investigation of a Hydrothermal Stable Hydrogen Permselective Silica Membrane for a Large Membrane Area Module" (in Japanese), Membrane, 30, 275-281 (2005b)
14. Nomura, M., H. Aida, S. Gopalakrishnan, T. Sugawara, S. Nakao, S. Yamazaki, T. Inada and Y. Iwamoto; "Steam Stability of a Silica Membrane Prepared by a Counter Diffusion Chemical Vapor Deposition," Desalination, 193, 1-7 (2006a)
15. Nomura, M., H. Aida, K. Nakatani, S. Gopalakrishnan, T. Sugawara, S. Nakao, M. Seshimo, T. Ishikawa and M. Kawamura; "Preparation of a Catalyst Composite Silica Membrane Reactor for Steam Reforming Reactions Using a Counter Diffusion CVD Method," Ind. Eng. Chem. Res., 45, 3950-3954 (2006b)
16. Oyama, S. T., D. Lee, P. Hacarlioglu and R. F. Saraf; "Theory of Hydrogen Permeability in Nonporous Silica Membranes," J. Membr. Sci., 244, 45-53 (2004)
17. Prabhu, A. K. and S. T. Oyama; "High Hydrogen Selective Ceramic Membranes: Application to the Transformation of Greenhouse Gases," J. Membr. Sci., 176, 233-248 (2000)
18. Raman, N. K. and C. J. Brinker; "Organic 'Template' Approach to Molecular Sieve Silica Membranes," J. Membr. Sci., 105, 273-279 (1995)
19. Tsuru, T., K. Yamaguchi, T. Yoshioka and M. Asaeda; "Methane Steam Reforming oy Microporous Catalytic Membrane Reactors," AIChE J., 50, 2794-2805 (2004)
20. Uemiya, S.; "State-of-the-Art of Supported Metal Membranes for Gas Separation," Sep. Purif. Methods, 28, 51-85 (1999)
21. 3 Counter Diffusion Chemical Vapor Deposition for Preparation of Molecular-Sieve Membranes," Phys. Chem. Chem. Phys., 2, 4465-4469 (2000)
22. Yoshino, Y., T. Suzuki, B. N. Nair, H. Taguchi and N. Itoh; "Development of Tubular Substrates, Silica Based Membranes and Membrane Modules for Hydrogen Separation at High Temperature," J. Membr. Sci., 267, 8-17 (2005)