Liquid immersion lithography using immersion liquids: Microscopic polarizabilities and the role of orientation contributions to light scattering

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5377, Issue PART 3, 2004, Pages 1587-1597

  Letz, M ^a   Knapp, K ^b  

^a SCHOTT AG   (Germany)

^b Schott Lithotec AG   (Germany)

Author keywords

Light scattering; Liquid immersion; Molecular fluid; Optical microlithography; Water

Indexed keywords

ANISOTROPY; DEGREES OF FREEDOM (MECHANICS); IMAGING TECHNIQUES; LIGHT ABSORPTION; LIGHT POLARIZATION; MOLECULAR VIBRATIONS; POLYMERS; RAMAN SCATTERING; REFRACTIVE INDEX; WATER;

IMAGING CONTRAST; IMMERSION FLUIDS; LIQUID IMMERSION; MOLECULAR FLUIDS;

PHOTOLITHOGRAPHY;

EID: 3843135036     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.547886     Document Type: Conference Paper

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