Theoretical simulation of extreme UV radiation source for lithography

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5374, Issue PART 1, 2004, Pages 405-412

  Fujima, K ^a   Nishihara, K ^b   Kawamura, T ^d   Furukawa, H ^d   Kagawa, T ^h   Koike, F ^g   More, R ^f   Murakami, M ^c   Nishikawa, T ^c   Sasaki, A ^e   Sunahara, A ^d   Zhakhovskii, V ^b   Fujimoto, T ^j   Tanuma, H ⁱ  

^a UNIVERSITY OF YAMANASHI   (Japan)

^b OSAKA UNIVERSITY   (Japan)

^c OKAYAMA UNIVERSITY   (Japan)

^d INSTITUTE FOR LASER TECHNOLOGY   (Japan)

^e JAPAN ATOMIC ENERGY AGENCY   (Japan)

^f NATIONAL INSTITUTE FOR FUSION SCIENCE   (Japan)

^g KITASATO UNIVERSITY   (Japan)

^h NARA WOMEN'S UNIVERSITY   (Japan)

ⁱ TOKYO METROPOLITAN UNIVERSITY   (Japan)

^j KYOTO UNIVERSITY   (Japan)

more..

Author keywords

[No Author keywords available]

Indexed keywords

LASER ENERGY; PINHOLE GRATINGS; RADIATION ENERGY; TRANSMISSION GRATING SPECTROMETER (TGS);

BANDWIDTH; COMPUTER SIMULATION; HYDRODYNAMICS; LASER BEAM EFFECTS; OPACITY; SPECTROMETERS; ULTRAVIOLET RADIATION;

LITHOGRAPHY;

EID: 3843119797     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.534989     Document Type: Conference Paper

References (7)

1. For example "Soft-X-ray Projection Lithography", Vol. 12, OSA Tech. Digest Set. (Opt. Soc. Am. 1991).
2. G. D. KUBIAK, L. J. BEMARDEZ, K. D. KRENZ and D. J. O'CONNELL, "Debris-free EUVL sources based on gas jets" OSA Proceedings on Extreme-Ultraviolet Lithography, edited by G. D. Kubiak and D. R. Kania (1996), vol.4, p.66.
3. R. C. SPITZER, T. J. ORZECHOWSKI, D. W. PHILLION, R. L. KAUFMANN, and C. CERJAN, "Conversion Efficiencies from Laser-produced Plasmas in the Extreme Ultraviolet Regime", J. Appl. Phys. 79, 2251 (1993).
4. V. BAKSHI, "EUVL Source Program at International SEMATECH", EUVL Source Workshop, Feb. 23, Santa Clara, CA (2003).
5. K. NISHIHARA, "Scaling Laws of Plasma Ablation by Thermal Radiation", Jpn. J. Appl. Phys. 21, L571 (1982).
6. A. BAR-SHALOM, M. KLAPISCH, W. H. GOLDSTEIN and J. OREG, "The HULLAC Package Computer set Codes for Atomic Structure and Processes in Plasmas", (unpublished)
7. E.U.Condon & G.H.Shortley, The theory of Atomic Spectra; Cambridge University Press (1935)