Ion beam-assisted planarization of chemically vapor deposited diamond thin films using electron cyclotron resonance plasma

Journal of Electronic Materials

Volumn 26, Issue 11, 1997, Pages 1365-1369

  Lee, Dong Gu ^a   Gilbert, Donald R ^a   Singh, Rajiv K ^a  

^a University of Florida   (United States)

Author keywords

Diamond film; Electron cyclotron resonance (ECR); Planarization

Indexed keywords

EID: 3843099059     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-997-0086-8     Document Type: Article

References (9)

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