Debonding of photoresists by organic solvents

Journal of Applied Polymer Science

Volumn 59, Issue 13, 1996, Pages 2029-2037

  Papathomas, K I ^a   Bhatt, A C ^a  

^a IBM MICROELECTRONICS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ORGANIC SOLVENTS; PHOTORESISTS; PRINTED CIRCUIT BOARDS; SENSORS; SOLUBILITY; STRIPPING (REMOVAL); SUBSTRATES; SURFACES; THERMAL EFFECTS;

COMPOSITE STRIP DEFLECTION; DEBONDING; FOTONIC SENSORS; METHYL CHLOROFORM; METHYLENE CHLORIDE;

POLYMERS;

EID: 3843095905     PISSN: 00218995     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1097-4628(19960328)59:13<2029::AID-APP7>3.0.CO;2-J     Document Type: Article

References (6)