Evaluation of the imprio 100 step and flash imprint lithography tool

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5374, Issue PART 2, 2004, Pages 1006-1016

  Gehoski, Kathleen A ^a   Mancini, David P ^a   Resnick, Douglas J ^a  

^a MOTOROLA INC   (United States)

Author keywords

Imprio 100; S FIL; Step and Flash Imprint Lithography; Template

Indexed keywords

CURING; ETCHING; MONOMERS; OPTICAL DEVICES; PHOTONS; SEMICONDUCTOR MATERIALS; SPIN COATING; VISCOSITY;

IMPRIO 100; S-FIL; STEP AND FLASH IMPRINT LITHOGRAPHY; TEMPLATE;

LITHOGRAPHY;

EID: 3843092679     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.537380     Document Type: Conference Paper

References (7)

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