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Volumn 5377, Issue PART 3, 2004, Pages 1522-1527
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Two dimensional image-based model calibration for OPC applications
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Author keywords
CD; Contour; Metrology; Models; OPC; Simulation
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Indexed keywords
CD;
INTEGRATED FLOW;
OPC;
ALGORITHMS;
CALIBRATION;
COMPUTER SIMULATION;
COMPUTER SOFTWARE;
DATA ACQUISITION;
ERROR ANALYSIS;
IMAGE PROCESSING;
SCANNING ELECTRON MICROSCOPY;
PHOTOLITHOGRAPHY;
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EID: 3843061126
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.538244 Document Type: Conference Paper |
Times cited : (25)
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References (1)
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