Investigation of shot noise induced line-edge roughness by continuous model based simulation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5376, Issue PART 1, 2004, Pages 312-321

  Yuan, Lei ^a   Neureuther, Andrew ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Continuous resist modeling; Flare; Large unlikely roughness event (LURE); Line edge roughness; Non fickean diffusion; Shot noise

Indexed keywords

CONTINUOUS RESIST MODELING; FLARE; LINE-EDGE ROUGHNESS; NON-FICKEAN DIFFUSION;

COMPUTER SIMULATION; IONIZATION; SHOT NOISE; STATISTICAL METHODS; SURFACE ROUGHNESS;

PHOTORESISTS;

EID: 3843060084     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.535516     Document Type: Conference Paper

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