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Volumn 5401, Issue , 2004, Pages 305-310

Electron beam induced deposition of iron carbon nanostructures from iron dodecacarbonyl vapour

Author keywords

Electron beam deposition; Iron dodecacarbonyl; Nanocomposites conductivity model

Indexed keywords

ELECTRON BEAM DEPOSITION; IMAGE DEPOSITION; IRON DODECACARBONYL; NANOCOMPOSITES CONDUCTIVITY MODEL;

EID: 3843059024     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.558349     Document Type: Conference Paper
Times cited : (1)

References (6)
  • 1
    • 0022579551 scopus 로고
    • New selective deposition technology by electron-beam induced surface reaction
    • S.Matsui, K.Mori, "New selective deposition technology by electron-beam induced surface reaction" J. Vac. Sci. Technol, B4(1), 299-304. 1986
    • (1986) J. Vac. Sci. Technol, B , vol.4 , Issue.1 , pp. 299-304
    • Matsui, S.1    Mori, K.2
  • 3
    • 0028317459 scopus 로고
    • Three-dimensional structurization by additive lithography, analysis of deposits using TEM and EDX, and application to field-emitter tips
    • J.Kretz, M.Rudolph, M.Weber, H.W.P.Koops, "Three-dimensional structurization by additive lithography, analysis of deposits using TEM and EDX, and application to field-emitter tips" Microel. Eng. 23, 477-481, 1994
    • (1994) Microel. Eng. , vol.23 , pp. 477-481
    • Kretz, J.1    Rudolph, M.2    Weber, M.3    Koops, H.W.P.4
  • 4
    • 4243630792 scopus 로고    scopus 로고
    • On-line nanolithography using electron beam-induced deposition technique
    • U.Hubner, R.Prontke, M.Blume, A.Reinhardt, H.W.P.Koops. "On-line nanolithography using electron beam-induced deposition technique", Microel. Eng. 57-58, 953, 2001
    • (2001) Microel. Eng. , vol.57-58 , pp. 953
    • Hubner, U.1    Prontke, R.2    Blume, M.3    Reinhardt, A.4    Koops, H.W.P.5
  • 6
    • 0017555679 scopus 로고
    • Electrical conduction in discontinuous metal films: A discussion
    • Morris J.E., Courts T.J. "Electrical conduction in discontinuous metal films: a discussion." Thin Solid Films. 47, 3-65, 1977.
    • (1977) Thin Solid Films. , vol.47 , pp. 3-65
    • Morris, J.E.1    Courts, T.J.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.