Performance of low resistivity electrode prepared by electroless plated for amorphous silicon thin-film transistors

Materials Science Forum

Volumn 561-565, Issue PART 2, 2007, Pages 1165-1168

  Tsay, Chien Yie ^a   Lin, Chung Kwei ^a   Lin, Hong Ming ^b   Chang, Shih Chieh ^c   Chung, Bor Chuan ^c  

^a FENG CHIA UNIVERSITY   (Taiwan)

^b TATUNG UNIVERSITY   (Taiwan)

^c INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

Electroless plated; Silver electrode; Thin film transistors

Indexed keywords

AMORPHOUS MATERIALS; ELECTRIC CONDUCTIVITY; ETCHING; SILICON; TRANSISTORS;

DRAIN ELECTRODES; ETCHING PROCESS; MASS PRODUCTION;

THIN FILMS;

EID: 38349181077     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/0-87849-462-6.1165     Document Type: Conference Paper

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