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Volumn 544-545, Issue , 2007, Pages 495-498
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Ti-Ca-P films formed by RF magnetron sputtering method using dual targets
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Author keywords
Calcium; Dual targets; Film; Phosphate; RF magnetron sputtering; Titanium
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Indexed keywords
MAGNETRON SPUTTERING;
SURFACE PROPERTIES;
TITANIUM;
SPUTTERING POWER;
TITANIUM IMPLANTS;
TITANIUM PLATES;
THIN FILMS;
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EID: 38349143158
PISSN: 02555476
EISSN: 16629752
Source Type: Book Series
DOI: 10.4028/0-87849-431-6.495 Document Type: Conference Paper |
Times cited : (5)
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References (10)
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