Epitaxial growth and surface roughness control of ferromagnetic thin films on Si by sputter deposition

Journal of Electronic Materials

Volumn 37, Issue 3, 2008, Pages 355-360

  Yang, Jianhua Joshua ^a   Ji, C X ^b   Yang, Ying ^b   Xiang, Hua ^b   Chang, Y A ^b  

^a HEWLETT PACKARD LABORATORIES   (United States)

^b UNIVERSITY OF WISCONSIN MADISON   (United States)

Author keywords

Epitaxial growth; Ferromagnetic; Heusler alloys; Magnetic tunnel junction; Surface roughness

Indexed keywords

FERROMAGNETIC LAYERS; HEUSLER ALLOYS; HEUSLER FM ELECTRODES; INTERMETALLIC HEUSLER ALLOYS; MAGNETIC TUNNEL JUNCTION (MTJ); ROOM TEMPERATURE;

CRYSTALLINE MATERIALS; EPITAXIAL GROWTH; FERROMAGNETIC MATERIALS; MAGNETRON SPUTTERING; SPUTTER DEPOSITION;

SURFACE ROUGHNESS;

EID: 38349098662     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-007-0333-z     Document Type: Article

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