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Volumn 50, Issue 10, 2007, Pages 601-608

Vapor deposition polymerization of para-Xylylene derivatives - Mechanism and applications

Author keywords

[No Author keywords available]

Indexed keywords

MEMS; POLYMERIZATION; SEMICONDUCTING ORGANIC COMPOUNDS; THIN FILMS; VAPOR DEPOSITION; XYLENE;

EID: 38349097111     PISSN: 05598516     EISSN: None     Source Type: Journal    
DOI: 10.3131/jvsj.50.601     Document Type: Review
Times cited : (33)

References (43)
  • 5
    • 38349083681 scopus 로고    scopus 로고
    • W. F. Gorham: J. Polym. Sci., Part Al, 4 (1966) 3027.
    • W. F. Gorham: J. Polym. Sci., Part Al, 4 (1966) 3027.
  • 16
    • 38349176676 scopus 로고    scopus 로고
    • http://www.hpetch.se/paratech/korrosionstest/indexenglish.html
  • 17
    • 0017533514 scopus 로고
    • IEEE Trans. Parts Hybrids Packag
    • V. S. Kale and T. J. Riley: IEEE Trans. Parts Hybrids Packag., PHP-I (3) (1977) 273.
    • (1977) PHP-I , vol.3 , pp. 273
    • Kale, V.S.1    Riley, T.J.2
  • 19
    • 38349148581 scopus 로고    scopus 로고
    • http://www.scscoatings.com/parylene_applications/rubber-silicone.cfm
  • 20
    • 38349087974 scopus 로고    scopus 로고
    • http://www.scscoatings.com/parylene_applications/ferrite-cores.cfm
  • 22
    • 38349113670 scopus 로고    scopus 로고
    • H. Yasuda: Chapter 22 in: Luminous Chemical Vapor Deposition and Interface Engineeing, Surfactant Science Series 122, Marcel Dekker, New York 2005
    • H. Yasuda: Chapter 22 in: Luminous Chemical Vapor Deposition and Interface Engineeing, Surfactant Science Series 122, Marcel Dekker, New York 2005
  • 26
    • 38349159464 scopus 로고    scopus 로고
    • _Parylenes_in_Medical; http://dev.devicelink.com/mddi/archive/00/08/004.html
    • http://www.azom.com/details.asp?ArticleID=264#_Parylenes_in_Medical; http://dev.devicelink.com/mddi/archive/00/08/004.html
  • 37
    • 0038155582 scopus 로고    scopus 로고
    • Micromachined high-aspect-ratio parylene beam and its application to low-frequency seismometer
    • Kyoto
    • Y. Suzuki and Y.-C. Tai: Micromachined high-aspect-ratio parylene beam and its application to low-frequency seismometer. Proceedings of the International Conference MEMS'03, Kyoto, 2003, 486-48
    • (2003) Proceedings of the International Conference MEMS'03 , pp. 486-448
    • Suzuki, Y.1    Tai, Y.-C.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.