Aging of plasma-deposited films prepared from organic monomers

Plasma Processes and Polymers

Volumn 4, Issue SUPPL.1, 2007, Pages

  Swaraj, Sufal ^a   Oran, Umut ^a   Lippitz, Andreas ^a   Friedrich, Jörg F ^a   Unger, Wolfgang E S ^a  

^a Bundesanstalt für Materialforschung und Prüfung ^*  (Germany)

Author keywords

ESCA XPS; NEXAFS; Plasma copolymer; Plasma polymerization

Indexed keywords

AGING EFFECTS; AROMATIC SPECIES; CONCENTRATION OF; DEPOSITED FILMS; DEPOSITION PARAMETERS; DUTY CYCLES; ESCA/XPS; FEED GAS COMPOSITION; HOMOPOLYMERS; MONOMER FUNCTIONALITY; NEAR EDGE X RAY ABSORPTION FINE STRUCTURE; NEXAFS; ORGANIC MOLECULES; ORGANIC MONOMERS; OXYGEN CONTENT; PLASMA COPOLYMER; PLASMA POLYMERIZED FILM;

ABSORPTION SPECTROSCOPY; COPOLYMERIZATION; FILM PREPARATION; FUNCTIONAL POLYMERS; GAS ABSORPTION; MONOMERS; ORGANIC POLYMERS; OXYGEN; PLASMA POLYMERIZATION; PLASMAS; POLYMER FILMS; POLYMERS; PRESSURE EFFECTS; UNSATURATED POLYMERS; X RAY PHOTOELECTRON SPECTROSCOPY;

PLASMA DIAGNOSTICS;

EID: 38349026570     PISSN: 16128850     EISSN: 16128869     Source Type: Journal    
DOI: 10.1002/ppap.200731905     Document Type: Conference Paper

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