SCOPUS 정보 검색 플랫폼

Journal of Applied Physics

Volumn 103, Issue 1, 2008, Pages

Optical behavior of reactive sputtered carbon nitride films during annealing

(4) Lejeune, M a Charvet, S a Zeinert, A a Benlahsen, M a

a Universite de Picardie Jules Verne (France)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; ANNEALING; FOURIER TRANSFORM INFRARED SPECTROSCOPY; LIGHT TRANSMISSION; MAGNETRON SPUTTERING; POROSITY; RAMAN SPECTROSCOPY; THIN FILMS;

PHOTOTHERMAL DEFLECTION SPECTROSCOPY (PDS); RADIO FREQUENCY;

CARBON NITRIDE;

EID: 38149008214 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.2828166 Document Type: Article

Times cited : (17)

References (42)

1
- 20444373328
- SCIEAS 0036-8075 10.1126/science.245.4920.841.
- A. Y. Liu and M. L. Cohen, Science SCIEAS 0036-8075 10.1126/science.245. 4920.841 245, 841 (1989).
- (1989) Science , vol.245 , pp. 841
- Liu, A.Y.¹ Cohen, M.L.²

2
- 0342945364
- PRLTAO 0031-9007 10.1103/PhysRevLett.75.1336.
- H. Sjöström, S. Stafström, E. Broman, and J.-E. Sundgren, Phys. Rev. Lett. PRLTAO 0031-9007 10.1103/PhysRevLett.75.1336 75, 1336 (1995).
- (1995) Phys. Rev. Lett. , vol.75 , pp. 1336
- Sjöström, H.¹ Stafström, S.² Broman, E.³ Sundgren, J.-E.⁴

3
- 0037345189
- MRBUAC 0025-5408.
- L. Hultman, J. Neidhardt, N. Hellgren, H. Sjöström, and J.-E. Sundgren, Mater. Res. Bull. MRBUAC 0025-5408 28, 194 (2003).
- (2003) Mater. Res. Bull. , vol.28 , pp. 194
- Hultman, L.¹ Neidhardt, J.² Hellgren, N.³ Sjöström, H.⁴ Sundgren, J.-E.⁵

4
- 1142309584
- ECCMF9 1388-2481 10.1016/j.elecom.2003.12.009.
- A. Lagrini, C. Deslouis, H. Cachet, M. Benlahsen, and S. Charvet, Electrochem. Commun. ECCMF9 1388-2481 10.1016/j.elecom.2003.12.009 6, 245 (2004).
- (2004) Electrochem. Commun. , vol.6 , pp. 245
- Lagrini, A.¹ Deslouis, C.² Cachet, H.³ Benlahsen, M.⁴ Charvet, S.⁵

5
- 30344464373
- CRBNAH 0008-6223 10.1016/j.carbon.2005.10.009.
- B. Zheng, W. T. Zheng, K. Zhang, Q. B. Wen, J. Q. Zhu, S. H. Meng, X. D. He, and J. C. Han, Carbon CRBNAH 0008-6223 10.1016/j.carbon.2005.10.009 44, 962 (2006).
- (2006) Carbon , vol.44 , pp. 962
- Zheng, B.¹ Zheng, W.T.² Zhang, K.³ Wen, Q.B.⁴ Zhu, J.Q.⁵ Meng, S.H.⁶ He, X.D.⁷ Han, J.C.⁸

6
- 0032692055
- DRMTE3 0925-9635 10.1016/S0925-9635(99)00142-9.
- S. Muhl and J. M. Mendez, Diamond Relat. Mater. DRMTE3 0925-9635 10.1016/S0925-9635(99)00142-9 8, 1809 (1999).
- (1999) Diamond Relat. Mater. , vol.8 , pp. 1809
- Muhl, S.¹ Mendez, J.M.²

7
- 1142302641
- SCTEEJ 0257-8972 10.1016/S0257-8972(99)00573-3.
- C. Quiros, P. Pricto, E. Elizalde, R. Perez-Casero, V. Gomez, P. Herreri, and J. M. Sanz, Surf. Coat. Technol. SCTEEJ 0257-8972 10.1016/S0257-8972(99) 00573-3 125, 278 (2000).
- (2000) Surf. Coat. Technol. , vol.125 , pp. 278
- Quiros, C.¹ Pricto, P.² Elizalde, E.³ Perez-Casero, R.⁴ Gomez, V.⁵ Herreri, P.⁶ Sanz, J.M.⁷

8
- 0037091842
- JAPIAU 0021-8979 10.1063/1.1459610.
- D. Das, K. H. Chen, S. Chattopadhyay, and L. C. Chen, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.1459610 91, 4944 (2002).
- (2002) J. Appl. Phys. , vol.91 , pp. 4944
- Das, D.¹ Chen, K.H.² Chattopadhyay, S.³ Chen, L.C.⁴

9
- 0032476326
- THSFAP 0040-6090 10.1016/S0040-6090(98)00984-5.
- A. K. M. S. Chowdhury, D. C. Cameron, and M. S. J. Hashmi, Thin Solid Films THSFAP 0040-6090 10.1016/S0040-6090(98)00984-5 332, 62 (1998).
- (1998) Thin Solid Films , vol.332 , pp. 62
- Chowdhury, A.K.M.S.¹ Cameron, D.C.² Hashmi, M.S.J.³

10
- 0035942290
- SSCOA4 0038-1098 10.1016/S0038-1098(01)00077-1.
- O. Durand-Drouhin, M. Lejeune, M. Clin, D. Ballutaud, and M. Benlahsen, Solid State Commun. SSCOA4 0038-1098 10.1016/S0038-1098(01)00077-1 118, 179 (2001).
- (2001) Solid State Commun. , vol.118 , pp. 179
- Durand-Drouhin, O.¹ Lejeune, M.² Clin, M.³ Ballutaud, D.⁴ Benlahsen, M.⁵

11
- 0035883559
- PRBMDO 0163-1829 10.1103/PhysRevB.64.125419.
- A. Laskarakis, S. Logothetidis, and M. Gioti, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.64.125419 64, 125419 (2001).
- (2001) Phys. Rev. B , vol.64 , pp. 125419
- Laskarakis, A.¹ Logothetidis, S.² Gioti, M.³

12
- 30244535151
- PRBMDO 0163-1829 10.1103/PhysRevB.35.2946.
- J. Robertson and E. P. O'Reilly, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.35.2946 35, 2946 (1987).
- (1987) Phys. Rev. B , vol.35 , pp. 2946
- Robertson, J.¹ O'Reilly, E.P.²

13
- 0036642975
- CRBNAH 0008-6223 10.1016/S0008-6223(01)00291-3.
- M. L. Theye and V. Paret, Carbon CRBNAH 0008-6223 10.1016/S0008-6223(01) 00291-3 40, 1153 (2002).
- (2002) Carbon , vol.40 , pp. 1153
- Theye, M.L.¹ Paret, V.²

14
- 0035798278
- SSCOA4 0038-1098 10.1016/S0038-1098(01)00411-2.
- M. Lejeune, O. Durand-Drouhin, K. Zellama, and M. Benlahsen, Solid State Commun. SSCOA4 0038-1098 10.1016/S0038-1098(01)00411-2 120, 337 (2001).
- (2001) Solid State Commun. , vol.120 , pp. 337
- Lejeune, M.¹ Durand-Drouhin, O.² Zellama, K.³ Benlahsen, M.⁴

15
- 0000136079
- DRMTE3 0925-9635 10.1016/0925-9635(94)05264-6.
- J. Robertson, Diamond Relat. Mater. DRMTE3 0925-9635 10.1016/0925- 9635(94)05264-6 4, 297 (1995).
- (1995) Diamond Relat. Mater. , vol.4 , pp. 297
- Robertson, J.¹

16
- 0033905258
- DRMTE3 0925-9635 10.1016/S0925-9635(00)00233-8.
- C. F. Ramos, M. J. Sayagús, T. C. Rojas, M. D. Alcalá, C. Real, and A. Fernández, Diamond Relat. Mater. DRMTE3 0925-9635 10.1016/S0925-9635(00)00233-8 9, 212 (2000).
- (2000) Diamond Relat. Mater. , vol.9 , pp. 212
- Ramos, C.F.¹ Sayagús, M.J.² Rojas, T.C.³ Alcalá, M.D.⁴ Real, C.⁵ Fernández, A.⁶

17
- 0033736515
- DRMTE3 0925-9635 10.1016/S0925-9635(99)00346-5.
- C. Popov, M. F. Plass, L. Zambov, and W. Kulisch, Diamond Relat. Mater. DRMTE3 0925-9635 10.1016/S0925-9635(99)00346-5 9, 539 (2000).
- (2000) Diamond Relat. Mater. , vol.9 , pp. 539
- Popov, C.¹ Plass, M.F.² Zambov, L.³ Kulisch, W.⁴

18
- 0142154980
- VACUAV 0042-207X 10.1016/S0042-207X(03)00146-5.
- J. J. Li, W. T. Zheng, Z. S. Jin, T. X. Gai, G. R. Gu, H. J. Bian, and C. Q. Hu, Vacuum VACUAV 0042-207X 10.1016/S0042-207X(03)00146-5 72, 233 (2004).
- (2004) Vacuum , vol.72 , pp. 233
- Li, J.J.¹ Zheng, W.T.² Jin, Z.S.³ Gai, T.X.⁴ Gu, G.R.⁵ Bian, H.J.⁶ Hu, C.Q.⁷

19
- 0036508456
- DRMTE3 0925-9635 10.1016/S0925-9635(01)00685-9.
- G. Q. Gu, S. H. Lee, and J. J. Lee, Diamond Relat. Mater. DRMTE3 0925-9635 10.1016/S0925-9635(01)00685-9 11, 633 (2002).
- (2002) Diamond Relat. Mater. , vol.11 , pp. 633
- Gu, G.Q.¹ Lee, S.H.² Lee, J.J.³

20
- 0031994423
- DRMTE3 0925-9635 10.1016/S0925-9635(97)00230-6.
- M. M. Lacerda, F. L. Freire, Jr., and G. Mariotto, Diamond Relat. Mater. DRMTE3 0925-9635 10.1016/S0925-9635(97)00230-6 7, 412 (1998).
- (1998) Diamond Relat. Mater. , vol.7 , pp. 412
- Lacerda, M.M.¹ Freire Jr., F.L.² Mariotto, G.³

21
- 0002173308
- VACUAV 0042-207X 10.1016/S0042-207X(00)00143-3.
- L. Hultman, Vacuum VACUAV 0042-207X 10.1016/S0042-207X(00)00143-3 57, 1 (2000).
- (2000) Vacuum , vol.57 , pp. 1
- Hultman, L.¹

22
- 0037017574
- JCOMEL 0953-8984 10.1088/0953-8984/14/8/301.
- L. H. Zhang, H. Gong, and J. P. Wang, J. Phys.: Condens. Matter JCOMEL 0953-8984 10.1088/0953-8984/14/8/301 14, 1697 (2002).
- (2002) J. Phys.: Condens. Matter , vol.14 , pp. 1697
- Zhang, L.H.¹ Gong, H.² Wang, J.P.³

23
- 0033722133
- JAPNDE 0021-4922 10.1143/JJAP.39.L420.
- X. C. Xiao, W. H. Jiang, L. X. Ong, X. F. Hu, and C. W. Lu, Jpn. J. Appl. Phys., Part 1 JAPNDE 0021-4922 10.1143/JJAP.39.L420 39, 420 (2000).
- (2000) Jpn. J. Appl. Phys., Part 1 , vol.39 , pp. 420
- Xiao, X.C.¹ Jiang, W.H.² Ong, L.X.³ Hu, X.F.⁴ Lu, C.W.⁵

24
- 0033327657
- THSFAP 0040-6090 10.1016/S0040-6090(99)00421-6.
- H. L. Bai and E. Y. Jiang, Thin Solid Films THSFAP 0040-6090 10.1016/S0040-6090(99)00421-6 353, 157 (1999).
- (1999) Thin Solid Films , vol.353 , pp. 157
- Bai, H.L.¹ Jiang, E.Y.²

25
- 0142011478
- THSFAP 0040-6090 10.1016/S0040-6090(03)00902-7.
- M. Lejeune, O. Durand-Drouhin, S. Charvet, A. Grosman, C. Ortega, and M. Benlahsen, Thin Solid Films THSFAP 0040-6090 10.1016/S0040-6090(03)00902-7 444, 1 (2003).
- (2003) Thin Solid Films , vol.444 , pp. 1
- Lejeune, M.¹ Durand-Drouhin, O.² Charvet, S.³ Grosman, A.⁴ Ortega, C.⁵ Benlahsen, M.⁶

26
- 0347603493
- O. Durand-Drouhin, M. Benlahsen, M. Clin, and R. Bouzerar, Applied Surface Science 233, 269 (2004).
- (2004) Applied Surface Science , vol.233 , pp. 269
- Durand-Drouhin, O.¹ Benlahsen, M.² Clin, M.³ Bouzerar, R.⁴

27
- 9744250308
- DRMTE3 0925-9635 10.1016/j.diamond.2004.05.005.
- O. Durand-Drouhin, M. Benlahsen, M. Clin, and K. Zellama, Diamond Relat. Mater. DRMTE3 0925-9635 10.1016/j.diamond.2004.05.005 13, 1854 (2004).
- (2004) Diamond Relat. Mater. , vol.13 , pp. 1854
- Durand-Drouhin, O.¹ Benlahsen, M.² Clin, M.³ Zellama, K.⁴

28
- 0001548543
- PRBMDO 0163-1829 10.1103/PhysRevB.39.13053.
- J. K. Kaufman, S. Metin, and D. D. Saperstein, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.39.13053 39, 13053 (1989).
- (1989) Phys. Rev. B , vol.39 , pp. 13053
- Kaufman, J.K.¹ Metin, S.² Saperstein, D.D.³

29
- 0036469967
- JAPIAU 0021-8979 10.1063/1.1425424, ();, Surf. Coat. Technol. SCTEEJ 0257-8972 10.1016/S0257-8972(01)01565-1 151, 257 (2001).
- G. Fanchini, A. Tagliaferro, G. Messina, S. Santangelo, A. Paoletti, and A. Tucciarone, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.1425424 91, 1155 (2002); G. Fanchini, G. Messina, A. Paoletti, S. C. Ray, S. Santangelo, A. Tagliaferro, and A. Tucciarone, Surf. Coat. Technol. SCTEEJ 0257-8972 10.1016/S0257-8972(01)01565-1 151, 257 (2001).
- (2002) J. Appl. Phys. , vol.91 , pp. 1155
- Fanchini, G.¹ Tagliaferro, A.² Messina, G.³ Santangelo, S.⁴ Paoletti, A.⁵ Tucciarone, A.⁶ Fanchini, G.⁷ Messina, G.⁸ Paoletti, A.⁹ Ray, S.C.¹⁰ Santangelo, S.¹¹ Tagliaferro, A.¹² Tucciarone, A.¹³

30
- 0038208253
- PRBMDO 0163-1829 10.1103/PhysRevB.67.155306.
- A. C. Ferrari, S. E. Rodil, and J. Robertson, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.67.155306 67, 155306 (2003).
- (2003) Phys. Rev. B , vol.67 , pp. 155306
- Ferrari, A.C.¹ Rodil, S.E.² Robertson, J.³

31
- 0001093698
- JAPIAU 0021-8979 10.1063/1.346690.
- X. Jiang, W. Beyer, and K. Reichelt, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.346690 68, 1378 (1990).
- (1990) J. Appl. Phys. , vol.68 , pp. 1378
- Jiang, X.¹ Beyer, W.² Reichelt, K.³

32
- 0004931969
- JNCSBJ 0022-3093.
- M. Benlahsen, B. Racine, M. Clin, and K. Zellama, J. Non-Cryst. Solids JNCSBJ 0022-3093 266/269, 783 (2000).
- (2000) J. Non-Cryst. Solids , vol.266-269 , pp. 783
- Benlahsen, M.¹ Racine, B.² Clin, M.³ Zellama, K.⁴

33
- 4243363393
- PRBMDO 0163-1829 10.1103/PhysRevB.30.870.
- D. Beeman, J. Silverman, R. Lynds, and M. R. Anderson, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.30.870 30, 870 (1984).
- (1984) Phys. Rev. B , vol.30 , pp. 870
- Beeman, D.¹ Silverman, J.² Lynds, R.³ Anderson, M.R.⁴

34
- 0028513408
- JAPIAU 0021-8979 10.1063/1.357385.
- M. A. Tamor and W. C. Vassell, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.357385 76, 3823 (1994).
- (1994) J. Appl. Phys. , vol.76 , pp. 3823
- Tamor, M.A.¹ Vassell, W.C.²

35
- 0014829099
- JCPSA6 0021-9606 10.1063/1.1674108.
- F. Tuinstra and J. L. Koenig, J. Chem. Phys. JCPSA6 0021-9606 10.1063/1.1674108 53, 1126 (1970).
- (1970) J. Chem. Phys. , vol.53 , pp. 1126
- Tuinstra, F.¹ Koenig, J.L.²

36
- 0242603790
- PRBMDO 0163-1829 10.1103/PhysRevB.61.14095.
- A. C. Ferrari and J. Robertson, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.61.14095 61, 14095 (2000).
- (2000) Phys. Rev. B , vol.61 , pp. 14095
- Ferrari, A.C.¹ Robertson, J.²

37
- 0035914890
- APPLAB 0003-6951 10.1063/1.1415046.
- M. Lejeune, R. Bouzerar, M. Benlahsen, O. Durand-Drouhin, and A. Zeinert, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.1415046 79, 3443 (2001).
- (2001) Appl. Phys. Lett. , vol.79 , pp. 3443
- Lejeune, M.¹ Bouzerar, R.² Benlahsen, M.³ Durand-Drouhin, O.⁴ Zeinert, A.⁵

38
- 0001088864
- PRBMDO 0163-1829 10.1103/PhysRevB.43.2131.
- D. Dasgupta, F. Demichelis, C. F. Pirri, and A. Tagliaferro, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.43.2131 43, 2131 (1991).
- (1991) Phys. Rev. B , vol.43 , pp. 2131
- Dasgupta, D.¹ Demichelis, F.² Pirri, C.F.³ Tagliaferro, A.⁴

39
- 0000653389
- PRBMDO 0163-1829 10.1103/PhysRevB.45.14364.
- F. Demichelis, C. F. Pirri, and A. Tagliaferro, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.45.14364 45, 14364 (1992).
- (1992) Phys. Rev. B , vol.45 , pp. 14364
- Demichelis, F.¹ Pirri, C.F.² Tagliaferro, A.³

40
- 0002995364
- Amorphous and Liquid Semiconductors, edited by J. Tauc (Plenum, London)
- J. Tauc, Amorphous and Liquid Semiconductors, edited by, J. Tauc, (Plenum, London, 1974), pp. 159-220.
- (1974) , pp. 159-220
- Tauc, J.¹

41
- 4344680351
- APPLAB 0003-6951 10.1063/1.1776633.
- G. Fanchini and A. Tagliaferro, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.1776633 85, 730 (2004).
- (2004) Appl. Phys. Lett. , vol.85 , pp. 730
- Fanchini, G.¹ Tagliaferro, A.²

42
- 13944279829
- PRBMDO 0163-1829 10.1103/PhysRevB.70.235417.
- J. D. Carey and S. R. P. Silva, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.70.235417 70, 235417 (2004).
- (2004) Phys. Rev. B , vol.70 , pp. 235417
- Carey, J.D.¹ Silva, S.R.P.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.