A closed-form approach for frequency tunable comb resonators with curved finger contour

Sensors and Actuators, A: Physical

Volumn 141, Issue 2, 2008, Pages 523-529

  Lee, Ki Bang ^a   Lin, Liwei ^b   Cho, Young Ho ^c  

^a KB Lab   (Singapore)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Electrostatic force; Frequency tuning; MEMS; Microresonator; Stiffness tuning; Surface micromachining; Tunable resonator

Indexed keywords

ELECTROSTATIC FORCE; MACHINE DESIGN; MEMS; NATURAL FREQUENCIES; STIFFNESS; SURFACE MICROMACHINING; TUNING;

FREQUENCY TUNING; MICRORESONATORS; STIFFNESS TUNING; TUNABLE RESONATORS;

RESONATORS;

EID: 38148998630     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.10.004     Document Type: Article

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