Development of a commercial facility of plasma immersion ion implantation and deposition

He Jishu/Nuclear Techniques

Volumn 30, Issue 12, 2007, Pages 983-986

  Wang, Langping ^a   Wang, Xiaofeng ^a   Tang, Baoyin ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Commercial facility; Function; Plasma immersion ion implantation and deposition

Indexed keywords

EID: 38049103257     PISSN: 02533219     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (5)