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Volumn 524-525, Issue , 2006, Pages 13-18

An X-ray diffraction method to determine stress at constant penetration/information depth

Author keywords

Information depth; Penetration depth; Stress gradient

Indexed keywords

DEPOSITION; ERRORS; NICKEL; SPUTTERING; STRESS ANALYSIS;

EID: 38049091209     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/0-87849-414-6.13     Document Type: Conference Paper
Times cited : (3)

References (12)
  • 5
    • 0141833844 scopus 로고    scopus 로고
    • Y. Akiniwa, K. Tanaka, K. Suzuki, E. Yanase, K. Nishio, Y. Kusumi, H. Okado and K. Arai: J. Mater. Sci. Japan (in Japanese) 52 (2003), p. 764
    • Y. Akiniwa, K. Tanaka, K. Suzuki, E. Yanase, K. Nishio, Y. Kusumi, H. Okado and K. Arai: J. Mater. Sci. Japan (in Japanese) Vol. 52 (2003), p. 764
  • 9
    • 38049048817 scopus 로고    scopus 로고
    • M. Wohlschlögel, W. Baumann, U. Welzel, A.Kumar and E.J. Mittemeijer: submitted for publication in the ECRS7 Proceedings
    • M. Wohlschlögel, W. Baumann, U. Welzel, A.Kumar and E.J. Mittemeijer: submitted for publication in the ECRS7 Proceedings


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.