A continuous non-linear shadowing model of columnar growth

Journal of Physics D: Applied Physics

Volumn 41, Issue 2, 2008, Pages

  Vo Thi, T H ^a   Rouet, J L ^a   Brault, P ^a   Bauchire, J M ^a   Cordier, S ^a   Josserand, C ^b  

^a UNIVERSITÉ D'ORLÉANS   (France)

^b INSTITUT JEAN LE ROND D ALEMBERT   (France)

Author keywords

[No Author keywords available]

Indexed keywords

MATHEMATICAL MODELS; PARTIAL DIFFERENTIAL EQUATIONS; PLASMAS; SPUTTER DEPOSITION;

COLUMNAR GROWTH; NONLINEAR DIFFUSION; SHADOWING MODELS;

NONLINEAR SYSTEMS;

EID: 38049048030     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/41/2/022003     Document Type: Article

References (21)

1. Bales G S and Zangwill A 1991 Macroscopic model for columnar growth of amorphous films by sputter deposition J. Vac. Sci. Technol. A 9 145-9
2. Rabat H and Brault P 2008 Plasma sputtering deposition of PEMFC porous carbon platinum Fuel Cells at press doi:10.1002/fuce.20070036
3. Messier R and Yehoda J E 1985 Geometry of thin-film morphology J. Appl. Phys. 58 3739-46
4. Dirks A G, Wolters R A and De Veirman A E M 1992 Columnar microstructures in magnetron-sputtered refractory metal thin films of tungsten, molybdenum and W-Ti-(N) Thin Solid Films 208 181-8
5. Bales G S, Bruinsma R, Eklund E A, Karunasiri R P U, Rudnick J and Zangwill A 1990 Growth and erosion of thin solid films Science 249 264-8
6. Karunasiri R P U, Bruinsma R and Rudnick J 1989 Thin film and the shadow instability Phys. Rev. Lett. 62 788-90
7. Roland C and Guo H 1991 Interfacial growth with a shadow instability Phys. Rev. Lett. 66 2104-7
8. Tamborenea P I and Das Sarma S 1993 Surface-diffusion-driven kinetic growth on one-dimensional substrates Phys. Rev. E 48 2575-94
9. Meng B and Weinberg W H 1996 Dynamical Monte-Carlo studies of molecular beam epitaxial growth models: interfacial scaling and morphology Surf. Sci. 364 151-63
10. Fichthorn K A and Weinberg W H 1991 Theoretical foundations of dynamical Monte-Carlo simulations J. Chem. Phys. 95 1090-6
11. Das Sarma S, Lanczycki C J, Kotlyar R and Ghaisas S V 1996 Scale invariance and dynamical correlations in growth models of molecular beam epitaxy Phys. Rev. E 53 359-89
12. Rost M and Krug J 1997 Coarsening of surface structures in unstable epitaxial growth Phys. Rev. E 55 3952-7
13. Amar J G and Family F 1992 Numerical solution of a continuous equation for interface growth in 2+1 dimensions Phys. Rev. A 41 3399-402
14. Yao J H, Roland C and Guo H 1992 Interfacial dynamics with long-range screening Phys. Rev. A 45 3903-12
15. Yao J H and Guo H 1993 Shadowing in the three dimensions Phys. Rev. E 47 1007-11
16. Drotar J T, Zhao Y-P, Lu T-M and Wang G-C 2000 Surface roughening growth and etching in 2 + 1 dimensions Phys. Rev. B 62 2118-25
17. Gillet F, Pierre-Louis O and Misbah C 2000 Non-linear evolution of step meander during growth of a vicinal surface with no desorption Eur. Phys. J. B 18 519-34
18. Kardar M, Parisi G and Zhang Y-C 1986 Dynamic scaling of growing interface Phys. Rev. Lett. 56 889-92
19. Lam C-H and Shin F G 1998 Anomaly in numerical integrations of the Kardar-Parisi-Zhang equation Phys. Rev. E 57 6506-11
20. Krug J 1997 Origin of scale invariance in growth processes Adv. Phys. 46 139-282
21. Krug J and Schimschak M 1995 Metastability of step flow growth in 1+1 dimensions J. Phys. I France 5 1065-86