Growth of ordered SrO layers on Si(100) using metal-organic surface reactions

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 26, Issue 1, 2008, Pages 83-89

  Willis, B G ^a   Mathew, A ^b  

^a University of Delaware   (United States)

^b UNIVERSITY OF DELAWARE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORBED COVERAGE; METAL-ORGANIC SURFACE REACTIONS; SATURATION COVERAGE; STRONTIUM OXIDE;

METALLORGANIC CHEMICAL VAPOR DEPOSITION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON; STRONTIUM COMPOUNDS; SURFACE TREATMENT; X RAY PHOTOELECTRON SPECTROSCOPY;

FILM GROWTH;

EID: 38049020689     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2819267     Document Type: Article

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