Investigation of sol-gel derived HfO 2 on 4H-SiC

Applied Surface Science

Volumn 254, Issue 7, 2008, Pages 1981-1985

  Wang, Kang Ji ^a   Cheong, Kuan Yew ^a  

^a SCHOOL OF MATERIALS AND MINERAL RESOURCES ENGINEERING   (Malaysia)

Author keywords

Hafnium oxide; High dielectric constant material; Silicon carbide; Sol gel spin on coating

Indexed keywords

ANNEALING; COATING TECHNIQUES; PHASE TRANSITIONS; SILICON CARBIDE; SOL-GELS; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

HAFNIUM OXIDE; HIGH DIELECTRIC CONSTANT MATERIAL; SEMICONDUCTOR PARAMETER ANALYZER; SOL-GEL SPIN-ON COATING;

HAFNIUM COMPOUNDS;

EID: 37749050006     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.08.012     Document Type: Article

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