Etching of GaAs substrates to create As-rich surface

Bulletin of Materials Science

Volumn 30, Issue 6, 2007, Pages 561-565

  Chanda, A ^a   Verma, S ^b   Jacob, C ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY   (India)

^b INSTITUTE OF PHYSICS   (India)

Author keywords

Etching; Semi insulating; XPS spectrum

Indexed keywords

ARSENIC; CLEANING; DEIONIZED WATER; ETCHING; ETHANOL; OPTICAL MICROSCOPY; SUBSTRATES; X RAY PHOTOELECTRON SPECTROSCOPY;

ETCH PITS; SEMI INSULATING; XPS SPECTRUM;

SEMICONDUCTING GALLIUM ARSENIDE;

EID: 37749037794     PISSN: 02504707     EISSN: None     Source Type: Journal    
DOI: 10.1007/s12034-007-0087-5     Document Type: Article

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