Characterization of laser-generated silicon plasma

Applied Surface Science

Volumn 254, Issue 7, 2008, Pages 2090-2095

  Torrisi, L ^a,b   Caridi, F ^a   Margarone, D ^a   Borrielli, A ^a  

^a UNIVERSITY OF MESSINA   (Italy)

^b INFN LABORATORI NAZIONALI DEL SUD   (Italy)

Author keywords

Electric field in plasma laser; Laser ablation; Plasma temperature; Silicon plasma

Indexed keywords

IONS; LASER ABLATION; PROBABILITY; SILICON; SURFACE CHARGE; VACUUM;

ELECTRIC FIELD IN PLASMA-LASER; ELECTROSTATIC ION DEFLECTION; MASS QUADRUPOLE SPECTROMETRY; NANOSECOND PULSED ABLATION; PLASMA TEMPERATURE;

LASER PRODUCED PLASMAS;

EID: 37749007794     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.08.066     Document Type: Article

References (16)

1. Conde J.C., Lusquinos F., Gonzalez P., Serra J., Leon B., Cultrera L., Guido D., and Perrone A. Appl. Phys. A 79 (2004) 1105
2. Gammino S., Torrisi L., Ciavola G., Andò L., Celona L., Manciagli S., Krasa J., Laska L., Pfeifer M., Rohlena K., Mezzasalma A.M., Gentile C., Picciotto A., Wolowski J., Woryna E., Badziak J., Parys P., Hitz D., and Shirkov G.D. J. Appl. Phys. 96 5 (2004) 2961
3. Giulietti D., and Gizzi L.A. Riv. del Nuovo Cimento 21 10 (1998) 1
4. Torrisi L., Gammino S., Andò L., Laska L., Krasa J., Rohlena K., Ullschmied J., Wolowski J., Badziak J., and Parys P. J. Appl. Phys. 99 (2006) 083301
5. http://www.hidenanalytical.com/products/, 2006.
6. Torrisi L., Andò L., Gammino S., and Laska L. J. Appl. Phys. 91 5 (2002) 4685
7. http://www.cranessoftware.com/products/systat/, 2006.
8. Milan M., and Laserna J.J. Spectrochim. Acta Part B 56 (2001) 275
9. Nassisi V., and Pedone A. Rev. Sci. Instrum. 7 1 (2003) 68
10. Torrisi L., and Gammino S. Rev. Sci. Instrum. 77 (2006) 03B707
11. Chen L.C. In: Chrisey D.B., and Hubler G.K. (Eds). Pulsed Laser Deposition of Thin Films (1994), J. Wiley & Sons, Inc., New York 167-198 (Chapter 6)
12. Torrisi L., Caridi F., Margarone D., Picciotto A., Mangione A., and Beltrano J.J. Appl. Surf. Sci. 252 18 (2006) 6883
13. Thum A., Rupp A., and Rohr K. J. Phys. D: Appl. Phys. 27 (1994) 1791
14. Torrisi L., Caridi F., Picciotto A., and Borrielli A. Nucl. Instrum. Method Phys. Res. B 252 (2006) 183
15. Cabalin L.M., and Laserna J.J. Spectrochim. Acta Part B 53 (1998) 723
16. Davies J.R., Bell A.R., and Tatarakis M. Phys. Rev. E 59 5 (1999) 6032