Gas permeability of porous silicon nanostructures

Physical Review E - Statistical, Nonlinear, and Soft Matter Physics

Volumn 70, Issue 1 2, 2004, Pages

  Lysenko, V ^a   Vitiello, J ^a   Remaki, B ^a   Barbier, D ^a  

^a INSTITUT DES NANOTECHNOLOGIES DE LYON   (France)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; CAPILLARY TUBES; CURRENT DENSITY; ELECTRON MICROSCOPY; ETCHING; FLOWMETERS; HYDROGEN; MATHEMATICAL MODELS; MECHANICAL PERMEABILITY; NANOSTRUCTURED MATERIALS; OXIDATION; POROSITY; RAMAN SPECTROSCOPY; VISCOSITY OF GASES;

DARCY'S LAW; GAS FLOW; KLINKENBERG EFFECT; KOZENY'S MODEL;

POROUS SILICON;

EID: 37649028674     PISSN: 15393755     EISSN: None     Source Type: Journal    
DOI: 10.1103/PhysRevE.70.017301     Document Type: Article

References (12)

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