Compact cantilever force probe for plasma pressure measurements

Review of Scientific Instruments

Volumn 78, Issue 12, 2007, Pages

  Nedzelskiy, I S ^a   Silva, C ^a   Fernandes, H ^a   Duarte, P ^a   Varandas, C A F ^a  

^a INSTITUTO SUPERIOR TÉCNICO   (Portugal)

Author keywords

[No Author keywords available]

Indexed keywords

BORON NITRIDE; ELECTROSTATIC ACTUATORS; ELECTROSTATIC FORCE; MICROELECTROMECHANICAL DEVICES; PRESSURE MEASUREMENT; TITANIUM;

CANTILEVER FORCE PROBE (CFP); PLASMA PRESSURE MEASUREMENTS; THRESHOLD VOLTAGE VALUE;

PLASMA PROBES;

EID: 37649013634     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2813897     Document Type: Article

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