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Volumn 46, Issue 12, 2007, Pages 7612-7618

Very low temperature epitaxial growth of silicon films for solar cells

Author keywords

Low temperature process; Plasma enhanced chemical vapor deposition; Silicon epitaxial growth; Solar cells; Stress relief

Indexed keywords

GROWTH (MATERIALS); LOW TEMPERATURE EFFECTS; SEMICONDUCTING SILICON; SOLAR CELLS; STRESS RELIEF;

LOW-TEMPERATURE PROCESSES; SILICON EPITAXIAL GROWTH;

THIN FILMS;

EID: 37549070302 PISSN: 00214922 EISSN: 13474065 Source Type: Journal
DOI: 10.1143/JJAP.46.7612 Document Type: Article

Times cited : (11)

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