Application of energy dispersive X-ray diffraction for the efficient investigation of internal stresses in thin films

Solid State Phenomena

Volumn 130, Issue , 2007, Pages 39-42

  Zschenderlein, U ^a   Kampfe B ^b   Schultrich, B ^c   Fritsche, G ^a  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

^b Fraunhofer Institute Reliability and Microintegration   (Germany)

^c FRAUNHOFER INSTITUTE FOR MATERIAL AND BEAM TECHNOLOGY IWS   (Germany)

Author keywords

Energy dispersive X ray diffraction; Hard coatings; Internal stresses; Residual stress analysis; Thin films; TiN

Indexed keywords

ENERGY DISPERSIVE SPECTROSCOPY; HARD COATINGS; PHYSICAL VAPOR DEPOSITION; RESIDUAL STRESSES; X RAY DIFFRACTION ANALYSIS;

COMPACT MEASURING DEVICES; ELASTIC ENERGY;

THIN FILMS;

EID: 37549065561     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: 10.4028/3-908451-40-x.39     Document Type: Conference Paper

References (9)

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