Flip-cathode design for carbon nanotube-based vacuum triodes

IEEE Electron Device Letters

Volumn 29, Issue 1, 2008, Pages 111-113

  Brunetti, Francesca ^a   Riccitelli, R ^a   Di Carlo, Aldo ^a   Fiori, A ^a   Orlanducci, S ^a   Sessa, V ^a   Terranova, M L ^a   Lucci, M ^a   Merlo, V ^a   Cirillo, M ^a  

^a UNIVERSITY OF ROME TOR VERGATA   (Italy)

Author keywords

Carbon nanotubes (CNTs); Field emission triode; Vacuum microelectronics

Indexed keywords

CATHODES; FABRICATION; FIELD EMISSION; FLIP CHIP DEVICES; MICROELECTRONICS; TRIODES;

FIELD EMISSION TRIODE; FLIP-CATHODE DESIGN; FLIP-CHIP DESIGN; NANOTRIODE FABRICATION; VACUUM MICROELECTRONICS;

CARBON NANOTUBES;

EID: 37549047553     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/LED.2007.910754     Document Type: Article

References (23)

1. L. De Forest, "De Forest Audion," US Patent 879 532, Feb. 18, 1908.
2. C. A. Spindt, I. Brodie, L. Humphrey, and E. R. Westerberg, "Physical properties of thin-film field emission cathodes with molybdenum cones," J. Appl. Phys., vol. 47, no. 12, pp. 5248-5263, Dec. 1976.
3. S. Ijima, "Helical microtubules of graphitic carbon," Nature, vol. 354, no. 6348, p. 56, Nov. 1991.
4. J.-M. Bonard, H. Kind, T. Stockli, and L.-O. Nilsson, "Field emission from carbon nanotubes: The first five years," Solid State Electron. vol. 45, no. 6, pp. 893-914, Jun. 2001.
5. V. Semet, V. T. Binh, P. Vincent, D. Guillot, K. B. K. Teo, M. Chhowalla, G. A. J. Amaratunga, W. I. Milne, P. Legagneux, and D. Pribat, "Field electron emission from individual carbon nanotubes of a vertically aligned array," Appl. Phys. Lett., vol. 81, no. 2, pp. 343-345, Jul. 2002.
6. F. Brunetti et al., "Realization of a carbon nanotube-based triode," in Proc. 6th IEEE Conf. Nanotechnol., Cincinnati, OH, 2006, pp. 246-249.
7. Y.-T. Janga, C.-H. Choi, B.-K. Ju, J.-H. Alm, and Y.-H. Lee, "Simple approach to fabricate microgated nanotubes emitter with a sidewall protector," Physica B, vol. 334, no. 1, pp. 9-12, Jun. 2003.
8. Y. M. Wong, S. Wei, W. P. Kang, J. L. Davidson, W. Hofmeister, J. H. Huang, and Y. Cui, "Carbon nanotubes field emission devices grown by thermal CVD with palladium as catalysts," Diam. Rel. Mater., vol. 13, no. 11/12, pp. 2105-2112, Nov./Dec. 2004.
9. G. S. Choi, K. H. Son, and D. J. Kim, "Fabrication of high performance carbon nanotube field emitters," Microelectron. Eng., vol. 66, no. 1, pp. 206-212, Apr. 2003.
10. W. J. Yu, Y. S. Cho, G. S. Choi, D. J. Kima, Y. H. Song, and J. H. Lee, "A stable high power carbon nanotube field-emitter device," Diam. Rel. Mater., vol. 13, no. 4-8, pp. 1017-1021, Apr.-Aug. 2004.
11. Y. S. Choi, J. H. Kang, H. Y. Kim, B. G. Lee, C. G. Lee, S. K. Kang, Y. W. Jin, J. W. Kim, J. E. Jung, and J. M. Kim, "A simple structure and fabrication of carbon-nanotube field emission display," Appl. Surf. Sci., vol. 221, no. 1, pp. 370-374, Jan. 2004.
12. J.-H. Han, S. H. Choi, T. Y. Leea, J.-B. Yoo, C.-Y. Park, H. J. Kim, I.-T. Han, S. Yu, W. Yi, G. S. Park, M. Yang, N. S. Lee, and J. M. Kim, "Effects of growth parameters on the selective area growth of carbon nanotubes," Thin Solid Films, vol. 409, no. 1, pp. 126-132, Apr. 2002.
13. C. Bower, D. Shalóm, W. Zhu, D. López, G. P. Kochanski, P. L. Gammel, and S. Jin, "A micromachined vacuum triode using a carbon nanotube cold cathode," IEEE Trans. Electron Devices, vol. 49, no. 8, pp. 1478-1483, Aug. 2002.
14. S. Si, F. Brunetti, A. Di Carlo, M. Lucci, S. Orlanducci, R. Riccitelli, and M. L. Terranova, "High frequency, cold cathode, triode-type, fieldemitter vacuum tube and process for manufacturing the same," Patent PCT/IT2006/000883, Dec. 29, 2006. (under review).
15. Y. M. Wong, W. P. Kang, J. L. Davidson, and J. H. Huang, "Carbon nanotubes field emission integrated triode amplifier array," Diam. Rel. Mater., vol. 15, no. 11/12, pp. 1990-1993, Nov./Dec. 2006.
16. Y. Huh, J. Y. Lee, J. H. Lee, T. J. Lee, S. C. Lyu, and C. J. Lee, "Selective growth and field emission of vertically well-aligned carbon nanotubes on hole-patterned silicon substrates," Chem. Phys. Lett. vol. 375, no. 3, pp. 388-392, Jul. 2003.
17. K. Kovacs, G. Kiss, M. Stenzel, and H. Zillgen, "Anodic oxidation of mobium sheets and porous bodies heat-treatment of the Nb/Nb-oxide system," J. Electrochem. Soc., vol. 150, no. 8, pp. B361-B366, Aug. 2003.
18. S. Orlanducci, V. Sessa, M. L. Terranova, M. Rossi, and D. Manno, "Aligned arrays of carbon nanotubes: Modulation of orientation and selected-area growth," Chem. Phys. Lett., vol. 367, no. 1, pp. 109-115, Jan. 2003.
19. M. L. Terranova, S. Piccirillo, V. Sessa, P. Sbornicchia, M. Rossi, S. Botti, and D. Manno, "Growth of single-walled carbon nanotubes by a novel technique using nanosized graphite as carbon source," Chem. Phys. Lett., vol. 327, no. 5, pp. 284-290, Sep. 2000.
20. L. Boyer, F. Houzé, A. Tonk, J.-L. Loubet, and J.-M. Georges, "The influence of surface roughness on the capacitance between a sphere and a plane," J. Phys. D, Appl. Phys., vol. 27, no. 7, pp. 1504-1508, Jul. 1994.
21. K. A. Dean and B. R. Chalamala, "Current saturation mechanisms in carbon nanotube field emitters," Appl. Phys. Lett., vol. 76, no. 3, pp. 375-377, Jan. 2000.
22. I. Boscolo, S. Cialdi, A. Fiori, S. Orlanducci, V. Sessa, M. L. Terranova, A. Ciorba, and M. Rossi, "Evaluation of the emitting area and anodecathode distance in field-emission experiments from single wall carbon nanotubes," J. Vac. Sci. Technol., vol. 25, no. 4, pp. 1253-1258, Jul. 2007.
23. W. P. Kang, Y. M. Wong, J. L. Davidson, D. V. Kerns, B. K. Choi, J. H. Huang, and K. F. Galloway, "Carbon nanotubes vacuum field emission differential amplifier integrated circuits," Electron. Lett., vol. 42, no. 4, pp. 210-211, Feb. 2006.